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Custom Made Products | Imported Products
Brief catalog of product: page1 - page2
- page3 - page4
- page5 - page6
- Products we offered includes original equipments imported from
USA & Europe and local LPCVD furnaces assembled & sold
by KHU with quantities more than 50 tubes to local opto-electronics
semiconductors industries as well as universities for doing wafer
growth application.
- The mail features/advantages of LPCVD furnace:
- All modulized design, less space, best for scale expanded
- Tubes diameter from 6 inches to 12 inches
- Automatic or manual loading can be selected
- Remote automatically control in temp profile, loading speed
& gas flow
- All parts come from USA original
- All stainless steel construction under clean room regulation
- Local service extended for prompt support
- Easy maintenance & replacement
- Provides 3 zones heating & 3 zones temp control &
monitoring
- Intergral chamber consisting ceramic fiber & embedded
heating units provides stable & constant temperature profile
¡Ó1¢J
- Low surface chamber temperature will not infect human &
environment
- Provides quartz tube & application kits
- Gas purged & evacuated system can be reached per request
- Flow control by flowmeter or mass flow controller depended
on request.
- Power module SSR/SCR
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LPCVD Drawing |
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LPCVD |
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LPCVD Furnace #1 |
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LPCVD Furnace #2 |
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LPCVD Furnace #3 |
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Thermocouple |
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Automatic Non-contact Sample Loader #1 |
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Automatic Non-contact Sample Loader #2 |
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Automatic Non-contact Sample Loader #3 |
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Automatic Non-contact Sample Loader #4 |
If you're interesting in our products, please contact
us
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